Micro-Nano Mechanical Systems (MNMS) Cleanroom

The Micro-Nano-Mechanical Systems Cleanroom Laboratory provides an opportunity for research and discovery that is otherwise unattainable in a typical laboratory setting. If you have any questions, please email Glennys Mensing, MNMS Laboratory Coordinator, at gmensing@illinois.edu, and Joe Maduzia, MNMS Laboratory Specialist, at jmaduzi2@illinois.edu

Description of Facilities

The Micro-Nano Mechanical Systems (MNMS) Cleanroom is a 3800 sq. ft suite of labs and related support rooms, including 2 cleanroom laboratories for research in the design and fabrication of small-scale mechanical systems. The lab supports research and instruction in the general area of micro- and nano-electro-mechanical systems (MEMS & NEMS), and nano-chemical-electrical-mechanical-manufacturing systems (Nano-CEMMS). The current focus is on devices employing nano-to-microscale mechanisms and the integration of these mechanisms into meso-scale devices.

The MNMS laboratory has class 100 and 10 cleanrooms for the microfabrication, inspection, and testing of devices. The cleanrooms house a range of state-of-the-art equipment including:

  • PlasmaTherm ICP-DRIE etching system
  • Two Oxygen / Argon RF RIE systems
  • Electron Visions (EVG) double-sided aligner
  • Flood exposure (402 nm exposure wavelength)
  • EVG wafer bonding system
  • 6-stack multi-zone tube-furnace system
  • High speed spinner and a wafer spinner housed in a laminar flow fume hood
  • Multiple chemical fume hoods (acid, base, and solvent)
  • Confocal 3-gun RF and pulsed-DC sputtering system
  • 4-pocket e-beam evaporator
  • Molecular Vapor Deposition (MVD) system
  • High-temperature furnace (max temperature is 2200 C)
  • Vacuum oven
  • Programmable curing oven
  • Goniometer
  • Micro-mechanical probe station with Labview and a complete set of electronics instrumentation for precise IV measurements
  • MX-50 Olympus wafer inspection optical microscope as well as a stereoscope and another microscope
  • An infrared imaging microscope
  • Scanning Electron Microscope (SEM)
  • Profilometer
  • STS ICP-DRIE etching system
  • Suss MJB3 Mask Aligner
  • AJA 8-gun DC Metal Sputtering System

In addition to the cleanroom laboratories, the MNMS laboratory has a preparation room for lapping, ultrasonic milling, and sample preparation. A chemical fume hood and glove box are also available.

University of Illinois custom designed equipment for microfabrication are available in a Class 1000 cleanroom. The equipment includes:

  1. Large feature Transfer Printer
  2. Laser Transfer Printer
  3. 5-axis Stage E-jet

Then continue on to “In Addition to the cleanroom…”