ME 485
ME 485 - MEMS Devices & Systems
Fall 2017
| Title | Rubric | Section | CRN | Type | Hours | Times | Days | Location | Instructor |
|---|---|---|---|---|---|---|---|---|---|
| MEMS Devices & Systems | ECE485 | C | 36987 | LEC | 3 | 0930 - 1050 | T R | 2013 Electrical & Computer Eng Bldg | Gang Logan Liu |
| MEMS Devices & Systems | ME485 | C | 36990 | LEC | 3 | 0930 - 1050 | T R | 2013 Electrical & Computer Eng Bldg | Gang Logan Liu |
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Official Description
Detailed Course Description
Introduction to principles, fabrication techniques, and applications of microelectromechanical systems (MEMS). In-depth analysis of sensors, actuator principles, and integrated microfabrication techniques for MEMS. Comprehensive investigation of state-of-the-art MEMS devices and systems. Same as IE 485 and ECE 485. Prerequisite: Senior standing in the College of Engineering. 3 undergraduate hours.
TOPICS:
1. Introduction and motivation
2. Electrostatic sensing and actuation principles
3. Thermal sensing and actuation principles
4. Piezoresistive sensing principles
5. Piezoelectric sensing and actuation principles
6. Magnetic sensing and actuation principles
7. Bulk and surface micromachining techniques
8. Microfabrication of semiconductor and in-organic materials
9. Case studies
ME: MechSE or technical elective.
EM: Possible secondary field, with approval.